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Lecture 1[1] J. H. Burroughs et al., "Light-Emitting Diodes Based on Conjugated Polymers," Nature, 347, 539 (1990). [2] A. Mihi, M. Oca&mtlide;a and H. Míguez, "Oriented Colloidal-Crystal Thin Films by Spin-Coating Microspheres Dispersed in Volatile Media," Adv. Mat., 18, 2244 (2006). [3] M. Madou, Fundamentals of Microfabrication: The Science of Miniaturization, 2nd ed.,( CRC Press, 2002). [4] J. H. Lai, "An Investigation of Spin Coating of Electron Resists," Polym. Eng. Sci., 19, 1117 (1979). [5] B. T. Chen, "Investigation of the Solvent-Evaporation Effect on Spin Coating of Thin Films," Polym. Eng. Sci., 23, 399 (1983). [6] W. J. Daughton and F. L. Givens, "An Investigation of the Thickness Variation of Spun-On Thin Films Commonly Associated with the Semiconductor Industry," J. Electrochem. Soc., 129, 173 (1982). [7] D. Meyerhofer, "Characteristics of Resist Films Produced by Spinning," J. Appl. Phys., 49, 3993 (1978). [8] A. G. Emslie, F. T. Bonner and L. G. Peck, "Flow of a Viscous Liquid on a Rotating Disk", J. Appl. Phys., 29, 5 (1958). [9] W. G. Cochran, "The Flow Due to a Rotating Disc", Proc. Cam. Phil. Soc., 30, 365 (1934). [10] D. E. Bornside, C. W. Macosko and L. E. Scriven, "Spin Coating of a PMMA/Chlorobenzene Solution", J. Electrochem. Soc., 138, 317 (1991). [11] F. Kreith, J. H. Taylor and J. P. Chong, "Heat and Mass Transfer from a Rotating Disk," J. Heat Trans., 81, 95 (1959). [12] E. M. Sparrow and J. L. Gregg, "Heat Transfer From a Rotating Disk to Fluids of Any Prandtl Number," J. Heat Trans., 81, 249 (1959). [13] ibid., "Mass Transfer, Flow, and Heat Transfer about a Rotating Disk," J. Heat Trans., 82, 294 (1960). [14] K. Denbigh, The Principles of Chemical Equilibrium, 4th ed., (Cambridge, 1981). [15] A. Acrivos, M. J. Shah and E. E. Petersen, "On the Flow of a Non-Newtonian Liquid on a Rotating Disk," J. Appl. Phys., 31, 963 (1960). [16] D. E. Bornside, C. W. Macosko and L. E. Scriven, "Unsteady Spreading of Thin Liquid Films with Small Surface Tension," Phys. Fluids A, 3, 733 (1991). [17] J. A. Moriarty, L. W. Schwartz and E. O. Tuck, "Spin Coating: One Dimensional Model," J. Appl. Phys., 66, 5185 (1989). [18] L. W. Schwartz and R. V. Roy, "Theoretical and Numerical Results for Spin Coating of Viscous Liquids," Phys. Fluids, 16, 569 (2004).
Lecture 1 Date: 2014-12-29; view: 1401
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