MODEL OF ERRORS OF MEMS ACCELEROMETER

NATIONAL AVIATION UNIVERSITY

AEROSPACE CONTROL SYSTEMS INSTITUTE

DEPARTMENT OF AVIATION COMPUTER INTEGRATED COMPLEXES

AIRCRAFT INSTRUMENTS AND INFORMATION SYSTEMS

LAB INSTRUCTIONS No1:

Mems accelerometer calibration

Teacher: Mukhina M.P.

Learning objectives:

Upon completion of this work you must be able to:

a To perform accelerometer calibration on gyrostabilized platform;

a to provide the identification of error model of MEMS accelerometer by results of calibration.

Background

MEMS TECHNOLOGY

Recent advances in Micro Electro Mechanical Systems (MEMS) based inertial sensors are quite significant in that they promise to be smaller and cheaper systems. MEMS is the integration of mechanical elements, sensors, actuators, and electronics on a common silicon substrate through the utilization of microfabrication technology.

An accelerometer is an electromechanical device that measures acceleration forces. These forces may be static, like the constant force of gravity pulling at our feet, or they could be dynamic - caused by moving or vibrating the accelerometer.

MODEL OF ERRORS OF MEMS ACCELEROMETER

Current commercial accelerometers are mainly classified as either mechanical or solid- state. As mentioned before, all accelerometers are suffering from a variety of error sources which are slightly different depending upon different types of the manufacturing principles. The error equation of conventional mechanical inertial sensors from the reference will be first introduced and the error equation will then be simplified according to the tolerance of a specific application such as land vehicle navigation system and MEMS technology.

Conventionally, the measurement in the X-axis provided by accelerometer ( ) can be expressed in terms of the applied acceleration acting along its sensitive axis (a_x ) and the accelerations acting along the pendulum and hinge axes. a_y and a_z respectively, by the equation:

Date: 2015-12-18; view: 1118