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Figure A-2 Trapezoidal Wire Shape Resulting from Manufacturing Processes

wire_edge_enlargement {

wee_widths W1 ... Wn

wee_spacings S1 ... Sm

wee_adjustments E11 ... E1n

.
.
.

Em1 ... Emn

}

Models the effect of wire-edge enlargement, if the wire_edge_enlargement, wee_width, wee_spacings, and wee_adjustments keywords are specified. The wee_adjustments table describes the amount of enlargement applied when certain spacings and widths are observed. For example, the wire is enlarged by Eij for spacing Si and width Wj. Positive enlargements oversize and negative enlargement undersize the wire. A piecewise constant interpolation is used to obtain enlargements for intermediate spacings and widths.

o wee_widths W1 ... Wn

Specifies the widths of the wires in the design. Typically, variation is only seen for widths less than 1.5 microns.

o wee_spacings S1 ... Sm

Specifies the spacings of the wires in the design. Typically, variation is only seen for spacings less than 1.5 microns.

o wee_adjustments E11...E1n ... Em1...Emn

Specifies the enlargement, either positive or negative, of the wire edge.

wire_thickness_ratio {

wtr_tile_width valueX valueY

wtr_stepper_window_width valueX valueY

wtr_adjustments [ratio density]+

}

Models the effect of erosion on wire thickness. This parameter is optional.

o wtr_tile_width valueX valueY

Specifies the dimensions of the tile that measures wire density. You can specify a single value or two separate values. If you provide a single value, the shape of the tile for the density computation is a square.

o wtr_stepper_window_width valueX valueY

Specifies the dimensions of the subtile, or stepper window, that measures wire density. It is similar to the X_fill_tile_step and the Y_fill_tile_step parameters for metal fill (see Figure A-3). If you do not specify this parameter, the stepper window width defaults to half of valueX and valueY given for wtr_tile_width. If you provide a single value, the shape of the stepper window for the density computation is a square.

o wtr_adjustments [ratio density]+

Specifies the number of wire thickness changes. Ratio is the ratio of the new wire thickness to the nominal wire thickness, and density is the density of the wire in the stepper window.

You must enter ratio and density as pairs:

ratio1 density1 ratio2 density2 ... ration densityn

The required fields in this syntax are min_spacing, min_width, resistivity, gate_forming_layer, min_net_fill_spacing, X_fill_fill_spacing, Y_fill_fill_spacing, unit_fill_region, and two of the following three parameters:

height (or delta_height and delta_layer)

thickness

upto

Figure A-3 illustrates these parameters.


Date: 2016-01-14; view: 351


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Figure A-1 Defining Thickness | Figure A-3 Geometric Fields in a Conducting Layer
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